Conversion efficiency calculations for EUV radiation emitted from laser-produced Tin plasmas
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Tarih
2009
Yazarlar
Dergi Başlığı
Dergi ISSN
Cilt Başlığı
Yayıncı
Tubitak Scientific & Technological Research Council Turkey
Erişim Hakkı
info:eu-repo/semantics/openAccess
Özet
Ni-like and Co-like EUV radiation between 11-17 nm emitted from laser produced tin plasmas was modelled by using the hydrodynamic/atomic physics code EHYBRID. The atomic data were obtained using the Cowan code. The effects of driving laser pulse duration and the laser intensity with different wavelengths were investigated. The maximum conversion efficiency was calculated as 13.4% for a 266 nm Nd: YAG laser with 1x10(13) W/cm(2) pulse intensity and 5 ns pulse duration.
Açıklama
Anahtar Kelimeler
Laser produced plasmas, plasma simulation, extreme ultraviolet radiation, lithography
Kaynak
Turkish Journal of Physics
WoS Q Değeri
N/A
Scopus Q Değeri
Q2
Cilt
33
Sayı
6
