Effects of carbon content and plasma power on room temperature photoluminescence characteristics of hydrogenated amorphous silicon carbide thin films deposited by PECVD

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dc.authoridGUNES, IBRAHIM/0000-0001-9388-6223
dc.contributor.authorGunes, Ibrahim
dc.contributor.authorSel, Kivanc
dc.date.accessioned2025-01-27T20:49:28Z
dc.date.available2025-01-27T20:49:28Z
dc.date.issued2017
dc.departmentÇanakkale Onsekiz Mart Üniversitesi
dc.description.abstractThe room temperature photoluminescence characteristics of a-SiCx:H thin films, deposited by plasma enhanced chemical vapor deposition technique with various carbon contents (x), at lower (30 mW/cm(2)) (LP) and higher (90 mW/cm(2)) (HP) power densities, were analyzed. The carbon content of the a-SiCx: H thin films was determined by X-ray photoelectron spectroscopy. The peak energies and the full width half maxima of the PL spectra were compared with the optical energies, determined by ultraviolet-visible transmittance measurements and a linearly correlated increase was observed as a function of x. PL peak energies shifted from 1.99 eV to 2.60 eV for LP and from 1.89 to 2.91 eV for HP films. The PL mechanisms were investigated in the frame of the static disorder model and the stokes shift model. Our analyses indicated that for LP films the stokes shift model and for HP films the static disorder model are the dominant mechanisms of PL; moreover it was determined that both of these independent models have contributions to PL mechanism. Additionally, PL spectra were analyzed by the joint density of tail states (JDOS) PL model. The increase in the PL peak energies and spectrum widths by the increase in the plasma power and carbon content considerably fitted to JDOS PL model, which could exclusively represent the PL mechanism by itself. (C) 2017 Elsevier B.V. All rights reserved.
dc.description.sponsorshipCanakkale Onsekiz Mart University The Scientific Research Coordination Unit [COMU-BAP 2011/010]
dc.description.sponsorshipThis work was supported by Canakkale Onsekiz Mart University The Scientific Research Coordination Unit, Project number: COMU-BAP 2011/010. Thanks to Prof. Dr. Ismail Atilgan, Prof. Dr. Bayram Katircioglu and Prof. Dr. Baris Akaoglu for sharing their laboratory facilities.
dc.identifier.doi10.1016/j.tsf.2017.05.041
dc.identifier.endpage92
dc.identifier.issn0040-6090
dc.identifier.scopus2-s2.0-85019976770
dc.identifier.scopusqualityQ2
dc.identifier.startpage85
dc.identifier.urihttps://doi.org/10.1016/j.tsf.2017.05.041
dc.identifier.urihttps://hdl.handle.net/20.500.12428/25169
dc.identifier.volume636
dc.identifier.wosWOS:000408037800013
dc.identifier.wosqualityQ2
dc.indekslendigikaynakWeb of Science
dc.indekslendigikaynakScopus
dc.language.isoen
dc.publisherElsevier Science Sa
dc.relation.ispartofThin Solid Films
dc.relation.publicationcategoryinfo:eu-repo/semantics/openAccess
dc.rightsinfo:eu-repo/semantics/closedAccess
dc.snmzKA_WoS_20250125
dc.subjectHydrogenated amorphous silicon carbide
dc.subjectPECVD
dc.subjectPhotoluminescence
dc.subjectStokes shift model
dc.subjectStatic disorder model
dc.subjectJoint density of tail states photoluminescence model
dc.subjectPhotoluminescence mechanisms
dc.titleEffects of carbon content and plasma power on room temperature photoluminescence characteristics of hydrogenated amorphous silicon carbide thin films deposited by PECVD
dc.typeArticle

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